NATIONAL
INSTITUTE OF INDUSTRIAL ENGINEERING
PGDIE-42
INDUSTRIAL ENGINEERING
ASSIGNMENT
Selected Component: DIODE
(Electronics)
SUBMITTED
BY:
ANKITA CHAUHAN (14)
JAYANT PATWARE (38)
1) Write down its design
process and come out with a design (Assume the required data)
Fabrication
Technology
1.
Introduction
2.
Fabrication processes
a.
Thermal
b.
Oxidation
c.
Etching techniques
d.
Diffusion
3. Expressions for diffusion of dopant concentration
4.
Ion implantation
5.
Photomask generation
6.
Photolithography
7.
Epitaxial growth
8.
Metallization and interconnections,
9.
Ohmi ccontacts
10. Planar PN junction diode fabrication,
11. Fabrication of resistors and capacitors in IC's.
1.
INTRODUCTION
·
The microminiaturization of
electronics circuits and systems and then concomitant application to computers
and communications represent major invasions of the twentieth century. These
have led to the introduction of new applications that were not possible with
discrete devices.
·
Integrated circuits on a single
silicon wafer followed by the increase of the size of the wafer to accommodate many
more such circuits served to significantly reduce the costs while increasing there
liability of these circuits.
·
1.
Silicon From Sand
2.
Fabrication
Process
a.
Oxidation
The process of oxidation
consists of growing a thin film of silicon dioxide on the surface of the
silicon wafer.
Silicon dioxide, as
we shall see later, plays an important role in shielding of the surface so that
dopant atoms, by diffusion or ion implantation, may be driven into other
selected regions
b.
Diffusion
This process consists of the introduction of a few tenths to several
micrometers of impurities by the solid-state diffusion of dopants into selected
regions of a wafer to form junctions.
c.
Ion Implantation
This
is a process of introducing dopants into selected areas of the surface of the
wafer by bombarding the surface with high-energy ions of the particular dopant.
d.
Photolithography
In
this process, the image on the reticle is transferred to the surface of the
wafer.
e.
Epitaxy
Epitaxy
is the process of the controlled growth of a crystalline doped layer of
silicon on a single crystal substrate.
f.
Metallization and interconnections
After
all semiconductor fabrication steps of a device or of an integrated circuit are
completed, it
becomes necessary to provide metallic interconnections for the integrated
circuit and for external connections to both the device and to the IC.
2. Design Assumming data
of planer PN junction diode
1.
An N+ substrate grown by the Czochralski
process is the starting metal of approximately 150μm thick.
2.
A layer of N-type silicon (1-5μm)
is grown on the substrate by epitaxy.
3.
Silicondioxide layer deposited by
oxidation.
4.
Surface is coated with photoresist
(positive).
5.
Mask is placed on surface of silicon,
aligned, and exposed to UV light.
6.
Mask is removed, resist is removed,
and SiOz under the exposed resist is etched.
7.
Boron is diffused to form Pregion.Boron
diffuses easily in silicon but noting SiO2
8.
Thin aluminum film is deposited
over surface.
9.
Metallized area is covered with
resist and an other mask isused to identify areas where metal is to be preserved.Wafer
is etched to remove unwanted metal.Resist is then dissolved.
10.
Contact metal is deposited on the
back surface and ohmic contacts are made by heat treatment.
3.
Supply Chain at chip level
Presently,
most of the raw and intermediate materials used in the LED packaging process
are imported. If the intermediate material is purchased locally, the supplier
company that is operating locally has imported the raw material to add value
Materials used
in LED Packaging
·
Wafer
·
Lead frame
·
Single sided PCB
·
Gold wire
·
Ceramic substrate
·
Aluminium substrate
·
Epoxy / silicone
Although
some of the materials may be available locally, companies are importing pricing
and meeting specifications and requirement
4. Manufacturing process of diode
1. Die
Bond: when semiconductor chip is attached to the substrate
2. Wire
Bond: where internal connections of diode is made
3. Modelling:
to protect the chip from internal connections
4. Marking:
using laser marking code on the tab
5. Slicing:
cutting the finished die into individual pieces
6. Test
and Tapping: each die tested individually and put on the tap reel
7. Testing
Equipment: reliability test for customer satisfaction
8. Measure
microscopic9.
Process
|
Control item
|
Control point
|
Purchase of
material
wafer
Diffusion
Film
thickness
Inspection
mask
Photolithography
Inspection
Metallization
PQC
Scribbling
Chip inspection
Pallet washing
PQC
Lead glass
Assembling
Sealing
Soldering
PQC
Screening
Total electrical
Inspection
PQC
Marking
Taping & packing
Shipment
Inspection
Warehouse
shipping
|
Type no.
Film thickness, resistivity
Appearance of wafer
Film thickness
Appearance of wafer
Appearance of chip
Type no.
Appearance , solder thickness
Electrical characteristics failure
analysis
Assurance of tapping
Electrical characteristic appearance
|
Part confirmation
Assurance of basic film thickness
Scratch and position deviation
Monitor scratch and metallization
Selection of good / bad chip
Part confirmation
Appearance of outline
Feedback of analysis information
|
References
2. Comchip technology’s flat chip diode
manufacturing process
3. Fabrication technology by B.G.
Balagangadhar (Ghousia college of enggineering)
Paper 1: PN-DIODE TRANSDUCED 3.7-GHZ
SILICON RESONATOR
Summary: We
present in this paper the design and fabrication of a homogeneous silicon micromechanical
resonator actuated using forces acting on the immobile charge in the depletion
region of a symmetrically doped pndiode. The proposed resonator combines the
high quality factor (Q) of airgap transduced resonators with the
frequency scaling benefits of internal dielectrically transduced resonators.
Using this transduction method, we demonstrate a thickness longitudinal mode micromechanical
resonator with Q ~ 18,000 at a resonant frequency of 3.72 GHz, yielding
an f·Q product of 6.69 x 1013, which is close to the intrinsic f·Q
product of 1014 for (100)-Si.
This
work combines the pioneering work of and to develop a micromechanical resonator
with the benefits of high quality factor at GHz frequencies. This is made
possible by the use of pn-diode transduction, which allows efficient
transduction at high frequencies without using a separate transducer material.
Using this method, we present a thickness longitudinal mode micromechanical
resonator with resonant frequency of 3.72 GHz and an f·Q product of 6.69
x 1013. This is close to the theoretical limit in (100)-Si of ~1014. In
addition, the proposed device results in a CMOS-compatible fabrication process
and higher device yield as compared to traditional air-gap or dielectrically transduced
resonators.
References: PN-DIODE TRANSDUCED 3.7-GHZ
SILICON RESONATOR
Eugene Hwang and Sunil A. Bhave
Cornell University, Ithaca, NY, USA
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